Lithography Systems Market Analysis

  • Report ID: 4514
  • Published Date: Jun 02, 2025
  • Report Format: PDF, PPT

Lithography Systems Segmentation

Application (Automotive, Consumer Electronics, Semiconductors, Medical Devices, Aerospace & Defense)

The semiconductor manufacturing segment is projected to garner 62.3% lithography systems market share owing to the rising demand for AI chips and high-performance computing. Lithography systems are crucial for making chips at upgraded nodes with almost 5nm of measurement. The U.S. Department of Commerce allocated USD 39.2 billion in 2024, considering semiconductor production as a national priority. Additionally, the European Union aims to double the global semiconductor market, needing a huge investment in EUV lithography systems. Other than this, the U.S. National Institute of Standards and Technology demonstrated that AI chip demand is expected to surge 5x by 2030, requiring more tools made by lithography.

Technology (EUV Lithography, DUV Lithography, I-line Lithography)

The EUV technology is anticipated to garner a maximum share of 48.5% by 2037. The growth of the lithography systems market can be attributed to the high need for precision. Research Nester suggests that EUV lowers the process steps by almost 32-50%, enhancing the efficiency and yield. Leading market players such as TSMC and Samsung are dependent upon EUV for making next-generation chips. Additionally, the European Commission marks the EUV as “critical technology” for the semiconductor industry. Also, EUV tools have become imperative for enabling next-generation semiconductor performance. 

Our in-depth analysis of the lithography systems market includes the following segments:

Type

  • Reticles
  • Masters

Trade

  • Captive
  • Merchant

Application

  • Automotive
  • Consumer Electronics
  • Semiconductors
  • Medical Devices
  • Aerospace & Defense

End User

  • Foundries
  • IDMs (Integrated Device Manufacturers)
  • OSATs (Outsourced Semiconductor Assembly and Test)

Technology

  • EUV Lithography
  • DUV Lithography
  • I-line Lithography

Wavelength

  • 193nm
  • 248nm
  • 13.5nm (EUV)

Browse key industry insights with market data tables & charts from the report:

Frequently Asked Questions (FAQ)

Lithography systems market in 2025 is estimated at USD 9.35 billion.

The global market size was more than USD 8.95 billion in 2024 and is anticipated to grow at a CAGR of over 5.6%, reaching USD 18.17 billion revenue by 2037.

The Asia Pacific region is projected to dominate the lithography systems market, garnering a revenue share of 42.7% revenue share.

The major players in the market are ASML Holding N.V.; Nikon Corporation; Canon Inc.; Ultratech (a division of Veeco); NuFlare Technology Inc.; SÜSS MicroTec SE; EV Group (EVG); Jeol Ltd.; SMEE (Shanghai Micro Electronics Equipment); Applied Materials Inc.; Vistec Electron Beam GmbH; Carl Zeiss SMT GmbH; LithoVision (Startup under CSIRO); Samsung Electronics Lithography Division; Bharat Electronics Limited (BEL);
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